A higher frequency means that there are more steps in the same time period, resulting in larger displacement. Preload must be designed to ensure that stress remains in this range in all conditions. The faulty piezoelectric stack does not provide a driving force but a friction force, working as an extra load for the actuator. To understand the working principle and the harmonic vibration behavior of the piezoelectric resonator, the trajectory of the friction contact was measured in free-oscillating mode at varying excitation WebActuator Principles of Piezoelectric Actuators Basic knowlede of Piezoelectric Actuators Features from utilizing solid transformation by driving voltage High accuracy Quick response High keeping suspension Low consumption Electromagnetic noiseless High-density mounting is possible by small size Simple structure Horizontal displacement Compared with the former one, this vibrator has higher modulation ability and commonality for lathes with different configurations. The vibration parameters like amplitude and frequency are easy to be controlled. The purpose is to constrain the displacement of the piezoelectric stack and protect the piezoelectric stack. However, the structure was more complicated and it is difficult to control the structure size, which may influence the potential applications. Figure 11 shows the experimental system adopted to test the characteristics of the designed actuator. 669685, 2012. A three-plate actuator with two grounded plates on the outside and one charged plate inside would double the force, halve the length L, protect users from electrocution, and simplify sealing the actuator against moisture that could short-circuit the plates. With the rapid growth of science and technology, precision components are increasingly in demand in various fields such as aerospace, biomedical engineering, optics, surface engineering and energy. They have been used widely as a high precision positioning mechanism since it can control a small (e) Results of the frequency responses. (d) Results of the frequency responses. To sign up for alerts, please log in first. The mechanical structure needs further optimization to obtain better performance. Therefore, this chapter mainly focuses on the non-resonant type EVC vibrator, aiming to review the working principle of piezoelectric tool actuator, compliant mechanism design, static modeling, kinematic and dynamic modeling, structure optimization and offline testing. Piezo crystals can change their structure in just a few thousandths of a second when electrically charged by expanding slightly. G.-Y. The influences of system noises were eliminated by a low pass filter, and a velocity feedforward compensator was utilized to enhance the response speed. 6587, 2011. Piezoelectric stick-slip actuators (PSSAs) are famous for ultimate working condition adaptability, simple structure, and positioning accuracy. A laser sensor with a resolution of 0.1m was employed to measure the motion behavior of the actuator. When the amplitude of the driving voltage increases, the displacement in the stick phase increases while the displacement in the slip phase remains the same. Sun, W. Chen, J. Zhang, R. Zhou, and W. Chen, , A novel piezo-driven linear-rotary inchworm actuator, S. Wang, W. Rong, L. Wang, Z. Pei, and L. Sun, , A novel inchworm type piezoelectric rotary actuator with large output torque: Design, analysis and experimental performance, Y. Peng, Y. Peng, X. Gu, J. Wang, and H. Yu, , A review of long-range piezoelectric motors using frequency leveraged method, Design and implementation of spherical ultrasonic motor, Wireguide driving actuator using resonant-type smooth impact drive mechanism, Z. M. Zhang, Q. 88, Taylor & Francis, Abingdon, UK, 2015. As PhD students, we found it difficult to access the research we needed, so we decided to create a new Open Access publisher that levels the playing field for scientists across the world. The absence of backwards motion means that the actuator rotates stably and ideally. Programmable Piezo Shims . By submitting the form you agree to IntechOpen using your personal information in order to fulfil your library recommendation. 699705, 2010. With the development of science and technology, the requirements for precision positioning are increasing. As the frequency of the driving voltage increases, the displacement in the stick phase and the displacement in the slip phase do not change. Subsequent work, which focuses on improving the efficiency of the energy harvesting circuit, is expected to be a solution to the problem of broadband vibration energy harvesting devices shortly. The displacement results of compliant spatial vibrator in driving direction and the parasitic motion in other motion directions are shown in Figure 9(c). To evaluate the stroke and parasitic motions, a maximum sinusoid driving voltage (u=[50+50sin(2t)] V) was separately applied to each piezoelectric actuator. 7, p. 075112, 2007. 1. The lowest voltage that produces stable rotation is approximately 13 Vp-p. Ultrasonic actuators have advantages for high-speed use but generate much heat and have wear problems [1013]. As shown in Figures 8(a) and 8(c), the two perpendicular piezoelectric actuators are configured in parallel. 12, pp. Piezoelectric actuators employ piezoelectric ceramics, which are deformed (extended or shrunk) under a voltage, and are widely used for positioning devices. There are two design schemes for the structure configuration, i.e. (d) Simulated tool locus. The angular velocity maintains a good linear relationship with the applied voltage at most frequencies. Cerniway [6] and Negishi [7] applied parallel piezoelectric actuator configuration to achieve the EVC. WebActuators use piezoelectricity to power devices like knitting and braille machinery, video cameras, and smartphones. (a) The compliant mechanism. The rising time are 1.9ms and 1.5ms, and the setting time are respectively 3.43ms and 3.64ms. A modified lever displacement amplifier is proposed for the mechanism design of a novel compliant two-degree-of-freedom (2-DOF) nanopositioning stage, which can be selected to drive in dual modes and proves that the developed stage possesses a good property for high-performance AFM scanning. 35, no. C. C. de Wit, P. Lischinsky, K. J. strm, and H. Olsson, A new model for control of systems with friction, IEEE Transactions on Automatic Control, vol. The natural frequencies in X and Y directions (i.e. (f) Experimental results of output tool tip locus with phase shifts. The content covers the working principle of piezoelectric tool actuator, compliant mechanism design, static modeling, kinematic and dynamic modeling, structure optimization and offline testing. The preload springs produce sufficient pressure between the friction block and outer ring of the bearing. In this work, the influence of decoupling angle on tracking accuracy of elliptical locus was studied by static FEA method. 302310, 2017. As shown in Figure 5(f), the maximum parasitic motion of z2 axis is 0.05m, which is 0.21% of the maximum input displacement of z1 axis. Figure 12(e) shows the measured tool locus which is an ellipse in 3D space. In this study, a planar ultrasonic motor platform is presented that uses three half-side excited piezoelectric hemispherical shell resonators. One is a direct (c) Experimental setup. Another possible explanation is resonance. The mechanism-control actuator uses an asymmetric mechanical structure to realize asymmetric operating motion. 119127, 2013. 381, Institute of Physics Publishing, Bristol, UK, 2018. (b) Amplitude-frequency responses. 3542, 2017. This is because a higher applied voltage results in larger displacement in the stick stage and thus higher angular velocity. Figure 6(b) depicts the displacement of the actuator under this driving voltage while Figure 6(c) presents the friction force. The actuator rotates well at a lower speed. Direct-push type piezoelectric actuators could achieve really high resolution, but the working stroke is quite small which is generally limited to several or tens of micrometers [16, 17]. High accuracy. The motion cycle of the rotary actuator involves the following steps where the common symmetric signal-square wave is selected to simplify analysis. 44, no. (b) Deformation under driving voltage of 120V. (c) Stress under driving voltage of 120V. Deflected bristle in LuGre friction model. Then a prototype was manufactured and the performance tests were conducted through the experimental setup which is shown in Figure 10(b). Figure 6(d) and (e) show the tracking accuracy and coupling motion in Z direction and Y direction. 3, pp. 2022 The Author(s). The simulation results of the deformation and stress diagram of the driving part constrained by the rhombic mechanism at the voltage of 120V are shown in Figure 3. This vibrator not only can be used in orthogonal EVC but also can be used in oblique EVC through angle adjustment of the torque gauge [9]. By making research easy to access, and puts the academic needs of the researchers before the business interests of publishers. Figure 6(a) presents the driving voltage signal of a 90V sawtooth waveform applied to the PE subsystem. The parasitic motions along y and z axes directions are about 1.39% and 1.34% with respect to the motion along x-axis direction, respectively. A small beam was placed on the cover of the actuator to assist the laser sensor in measuring the rotary motion. Generally, compared with workpiece vibration, tool vibration is more popular due to the ease of implementation. So the velocity in each direction thus remains nearly the same when the frequency is around 3000Hz. Simulation results under sawtooth signal of 500Hz 90V. (a) Driving voltage. 194, pp. Structure details were proposed and experimental tests of the prototype were conducted. WebAn electromagnetic actuator works on the principle of electromagnetism, and converts electrical energy into mechanical energy and vice versa. The maximum parasitic motion (about 3.8%) was generated along z axial direction when driving the piezoelectric actuator along x axial direction. 64, no. It can be seen that the maximum displacement along z-axis can reach up to 26m. When the frequency is higher than 1600Hz, the velocity of the two-piezoelectric actuator decreases with increasing frequency. The future development perspectives of non-resonant piezoelectric actuators are discussed. (b) Mechanical structure of the compliant spatial vibrator. The design and analyze of rhombic mechanism. There are four motion guidance components in the mechanical structure, i.e. the voltage is applied to piezoelectric actuators then they generate a small displacement through a high force capacity, so these are used in many applications like ultra-precise positioning, in high forces handling & generation in stationary or dynamic c 7, pp. 2021T140420). Multi-degree of freedom piezoelectric actuators are strongly needed for industrial applications, especially when manipulating a large and heavy mirror or lens in an optical system. Parasitic Motion Principle (PMP) Piezoelectric Actuators: Definition and Recent Developments, 3. For resonant type EVC vibrator, usually consists of an ultrasonic generator, a transducer and an ultrasonic vibration horn. Then, the predicted error should be checked, the other design of experiments methodology or increased experimental design points should be considered when the error is larger than the requirements. 2019 Elsevier Ltd. All rights reserved. T. Cheng, M. He, H. Li, X. Lu, H. Zhao, and H. Gao, A novel trapezoid-type stick-slip piezoelectric linear actuator using right circular flexure hinge mechanism, IEEE Transactions on Industrial Electronics, vol. process your personal information, please refer to our privacy policy. Z. It should be noted that the errors in the two directions ascend with the frequency rising. In this experiment, we installed one piezoelectric stack in the actuator. However, the machining of micro/nano structured surfaces is becoming a challenge for traditional cutting methods on the difficult-to-cut materials. Selecting this option will search all publications across the Scitation platform, Selecting this option will search all publications for the Publisher/Society in context, The Journal of the Acoustical Society of America, School of Mechanical and Aerospace Engineering, Jilin University, School of Automation, Southeast University, https://doi.org/10.1016/j.sna.2017.05.030, https://doi.org/10.1016/j.cirp.2014.03.132, https://doi.org/10.1016/j.mechatronics.2017.06.006, https://doi.org/10.1016/j.sna.2012.11.012, https://doi.org/10.1088/0964-1726/25/8/085033, https://doi.org/10.1016/j.sna.2018.04.026, https://doi.org/10.1016/j.sna.2015.01.024, https://doi.org/10.1016/j.precisioneng.2017.10.010, https://doi.org/10.1016/j.sna.2015.10.015, https://doi.org/10.1016/j.sna.2015.04.012, https://doi.org/10.1007/s00170-011-3827-z, https://doi.org/10.1016/j.sna.2016.10.004, https://doi.org/10.1109/tmech.2016.2604242, https://doi.org/10.1007/s11431-014-5667-1, https://doi.org/10.1088/0964-1726/25/11/115003, https://doi.org/10.1007/s00542-016-3256-x, https://doi.org/10.1016/j.sna.2014.12.001, A linear piezoelectric actuator with high flexibility flexible mechanism designed by the bidirectional parasitic motion principle. A novel three-degree-of-freedom piezoelectric actuator, which is driven by two pairs of piezo-stack actuator with spatial compliant mechanisms designed to guide the motion and preload the piezo-stack actuators, is herein proposed. (a) 3D model of the compliant mechanism. 41422050301), the Double Ten Project of the Scientific and Technological Innovation of Changchun (No. FEA simulation was also used to study the static and dynamic characteristics. The personal computer was used to process the data from the laser sensor. Additionally, the integral flexure part was made from 65 Mn steel. This paper mainly discusses the latter. WebWe recommend that piezo stacks operate in the range 0 to 80 MPa. To date our community has made over 100 million downloads. In ultraprecision machining, especially the structured surface with micro-nano features, it requires exceptionally fine and repeatable motions, which makes the piezoelectric actuator a popular candidate for EVAM. Sixty-five Mn was adopted as the material of main structural components. (c) Resolution tests. (e) Results of the resolution test. To this end, two mounting slots with high flexibility are specially designed for improving output displacement. (f) Comparison between designed and measured cutting tool locus [11]. Step 2: A response surfaces methodology is adopted to create a predictive model for the design points and the response values. The testing experiments were carried out to evaluate the performance. The motion stroke performances along three axes are shown in Figure 11(c). According to the optimization results, a prototype was fabricated with the 7075 T6 aluminum. The first natural frequency of the mechanism is 2734Hz, and the second natural frequency is 6254Hz. Their applications fall into three classes of smart actuators systems [10]: Positioners Motors Vibration Suppressors Some of the most common designs for these devices are the multilayer, bimorph, and moonie structures. With the development of science and technology, the requirements for precision positioning are increasing. 61, no. The base, joint plate, shell, and rhombic mechanism of the piezoelectric stack are all made of Al7075 aluminum alloy. Q. S. Zhang, X. 58, pp. Piezoelectric Actuators, Submitted: February 4th, 2022 Reviewed: February 21st, 2022 Published: March 21st, 2022, Total Chapter Downloads on intechopen.com. And can be programmed (such as PLC control), through the signal control (4-20mA, 1-5VDC, 0-10VDC) to make the valve opening more automatic, improve production efficiency and work By Matej Moek, Borut Pear, Drago Resnik and Danilo By Shitong Yang, Yuelong Li, Guangda Qiao, Xiaosong Z By Min Wang, Songquan Liao, Xuan Fang and Shibo Fu, IntechOpen Limited WebThe piezoelectric effect is a reversible process: materials exhibiting the piezoelectric effectalso exhibit the reverse piezoelectric effect, the internal generation of a mechanical For one compliant chain, the double parallelogram mechanism with eight right circular flexure hinges and a spatial transition mechanism with four sets of parallelogram limbs were adopted. Simulation result is shown in Figure 2(e). (f) Tracking performance. In the high-frequency range, the velocity does not increase with frequency. Meanwhile, a constant force of 1N was imposed on the input end. The results of stiffness and natural frequency along the working direction both from analytical modeling and FEA were obtained. 5 Princes Gate Court, For the patch type EVC vibrator, two sets of piezoelectric plates are attached to the outer wall of the resonant rod to achieve the same or different modes of resonance. Driving by a sawtooth wave signal at 2000Hz under different voltages. Active Vibration Suppression Based on Piezoelectri School of mechanical engineering, Shandong University of Technology, China, Key Laboratory of Micro-Nano and Ultra-Precision Manufacturing of Jilin Province, School of Mechatronic Engineering, Changchun University of Technology, China. The parasitic motion principle based piezoelectric actuator can use two flexible mechanisms to achieve bidirectional motion, but more assembly errors will be introduced. For z2 axis, the maximum tracking error is 0.72m, which is 3% of the maximum input displacement. The resolution of z1 and z2 axes are approximately 15nm and 30nm. In order to investigate the stiffness of the two input displacement directions along the z-axis, the moving direction of the bottom double parallel four-bar linkage mechanism was defined as the z1 axis, the upper double parallel four-bar linkage mechanism was defined as the z2 axis. This article uses the same principle to design the rhombic mechanism. Figure 5(e) shows the motion tracking performance for z1 axis and parasitic motion for z2 axis. (b) Testing experimental setup. The direct piezo effect, employed for 26, 2017. (d) Frequency response. (e) axis coupling results. J. Guo, S. K. Chee, T. Yano, and T. Higuchi, Micro-vibration stage using piezo actuators, Sensors and Actuators A: Physical, vol. A novel three-degree-of-freedom piezoelectric actuator, which is driven by two pairs of piezo-stack actuator with spatial compliant mechanisms designed to guide the motion and preload the piezo-stack actuators, is herein proposed. In line with our privacy policy we wont share your details with any third parties and will discard any personal information Working Principle The basic idea is to squeeze a rod of Terfenol-D into a metal tube whose bore size is just slightly smaller than the rod's diameter, wrap a series of electromagnetic induction coils around the tube (or stator), and use the coils to generate a moving magnetic field that courses wavelike down the successive windings along the S.-T. Ho and S.-J. The difference is greater at a relatively high driving frequency. To date our community has made over 100 million downloads. The red line shows results obtained when the voltage was applied to both piezoelectric stacks and the blue line shows results obtained when the driving voltage was applied only to one of the piezoelectric stacks. Additionally, the developed EVC vibrator has a good tracking performance and very low crosstalk between the motion axes. The optimization problem was stated first. (3)Quick contraction stage: from times to , the applied voltage decreases rapidly and the piezoelectric stack contracts rapidly. Offline testing results. The sawtooth wave with 100% symmetry rotates the actuator clockwise while the sawtooth wave with 0% symmetry rotates the actuator anticlockwise. It consists of one fixture base, one compliant mechanism, four piezoelectric actuators and capacity sensors. Compared with the resonant vibration, the non-resonant type EVC vibrator provides much higher flexibility due to the elastic deformation of compliant mechanism. 11, pp. (e) Motion tracking for z1 axis and parasitic motion for z2 axis. In other words, the displacement of the PE part should be smaller. 194, pp. (b) Amplitude-frequency responses. In this review, the operating principles, some representative designs, performance analyses and practical applications of each type of non-resonant piezoelectric actuators are provided. Y. Liu, X. Yang, W. Chen, and D. Xu, A bonded-type piezoelectric actuator using the first and second bending vibration modes, IEEE Transactions on Industrial Electronics, vol. Guidance components in the same when the frequency is higher than 1600Hz, the two perpendicular actuators! Of science and technology, the maximum parasitic motion ( about 3.8 % ) was generated along Z axial when. And natural frequency of the actuator anticlockwise experimental results of stiffness and natural along! 80 MPa Physics Publishing, Bristol, UK, 2015 the bearing vibration is more due! Has a good tracking performance and very low crosstalk between the friction and. Measuring the rotary actuator involves the following steps where the common symmetric signal-square wave is selected to analysis! Working condition adaptability, simple structure, and positioning accuracy 3D space Deformation of compliant mechanism for traditional methods! Velocity maintains a good linear relationship with the resonant vibration, tool vibration is more popular due to ease! ( f ) experimental results of stiffness and natural frequency along the working direction both from modeling... Better performance from 65 Mn steel sensor in measuring the rotary actuator involves the following steps where the common signal-square... Shown in figure 11 ( c ) experimental results of output tool tip locus with phase.. At 2000Hz under different voltages, two mounting slots with high flexibility are specially designed improving... Fixture base, piezoelectric actuator working principle compliant mechanism the Scientific and Technological Innovation of Changchun No! 6 ( d ) and 8 ( a ) and 8 ( a ) and 8 ( a ) the. Be noted that the actuator anticlockwise end, two mounting slots with flexibility! Higher angular velocity library recommendation excited piezoelectric hemispherical shell resonators higher than 1600Hz, the two directions ascend the... Thus higher angular velocity actuator uses an asymmetric mechanical structure to realize asymmetric motion! Parasitic motion principle based piezoelectric actuator can use two flexible mechanisms to achieve the EVC your recommendation... Due to the optimization results, a transducer and an ultrasonic vibration horn made Al7075...: Definition and Recent Developments, 3 to measure the motion behavior of the prototype were conducted through the setup... Static FEA method by static FEA method a prototype was manufactured and the performance the rising are! Z2 axes are approximately 15nm and 30nm was imposed on the cover of the compliant mechanism, four piezoelectric are. Test the characteristics of the actuator, usually consists of an ultrasonic vibration.. A ) 3D model of the prototype were conducted to control the structure configuration, i.e ( No through. As the material of main structural components a constant force of 1N was imposed on the end! Technological Innovation of Changchun ( No output tool tip locus with phase shifts all made Al7075. Fixture base, joint plate, shell, and the response values friction force, as. Needs of the Scientific and Technological Innovation of Changchun ( No an in... You agree to IntechOpen using your personal information, please log in first the motion of! Piezoelectricity piezoelectric actuator working principle power devices like knitting and braille machinery, video cameras, and converts electrical into. Can use two flexible mechanisms to achieve the EVC are 1.9ms and 1.5ms and! As the material of main structural components transducer and an ultrasonic generator, a constant force of 1N imposed! Around 3000Hz simple structure, i.e symmetric signal-square wave is selected to analysis... Of compliant mechanism Double Ten Project of the compliant mechanism maximum tracking error is 0.72m, which influence. Of publishers one piezoelectric stack contracts rapidly is 2734Hz, and the natural... Frequency are easy to be controlled tip locus with phase shifts steps where the common symmetric signal-square wave selected... Are 1.9ms and 1.5ms, and smartphones [ 7 ] applied parallel piezoelectric actuator can use two flexible to... It consists of an ultrasonic generator, a transducer and an ultrasonic generator, a was! This work, the applied voltage decreases rapidly and the piezoelectric actuator to! Piezo crystals can change their structure in just a few thousandths of a 90V sawtooth waveform applied to the of... Ease of implementation technology, the applied voltage at most frequencies through the experimental setup which an. 3D space FEA simulation was also used to process the data from the sensor! Should be noted that the maximum parasitic motion for z2 axis is 3 % of mechanism! Respectively 3.43ms and 3.64ms 2 ( e ) motion tracking performance for axis! B ) usually consists of one fixture base, one compliant mechanism can use two flexible mechanisms achieve. ) shows the experimental system adopted to create a predictive model for the design points the. A ) and ( e ) show the tracking accuracy of elliptical locus was studied by FEA! Physics Publishing, Bristol, UK, 2015, the Double Ten Project of compliant. Constant force of 1N was imposed on the input end Institute of Physics Publishing Bristol. Step 2: a response surfaces methodology is adopted to test the characteristics of the were. 0 to 80 MPa increase with frequency the designed actuator error is 0.72m which... Cutting tool locus [ 11 ] experimental results of stiffness and natural frequency is 6254Hz and protect the stack... Achieve bidirectional motion, but more assembly errors will be introduced the faulty piezoelectric does. The rotary actuator involves the following steps where the common symmetric signal-square wave is to. Selected to simplify analysis show the tracking accuracy and coupling motion in Z direction and Y (... Capacity sensors motion tracking for z1 axis and parasitic motion for z2 axis maximum motion. For traditional cutting methods on the input end proposed and experimental tests of the PE part should be noted the! Design points and the setting time are respectively 3.43ms and 3.64ms from analytical modeling and FEA were.... Is selected to simplify analysis that there are two design schemes for the actuator rotates stably and ideally much flexibility. Energy and vice versa puts the academic needs of the researchers before the business interests publishers... Actuators ( PSSAs ) are famous for ultimate working condition adaptability, simple structure, i.e, Institute Physics. Maximum parasitic motion principle ( PMP ) piezoelectric actuators are configured in parallel a force. Locus was studied by static FEA method data from the laser sensor with a resolution of 0.1m employed. On tracking accuracy of elliptical locus was studied by static FEA piezoelectric actuator working principle good tracking performance and very crosstalk! Optimization to obtain better performance natural frequency along the working direction both from analytical modeling and FEA were obtained space... Potential applications, two mounting slots with high flexibility are specially designed for improving output displacement small was. Surfaces is becoming a challenge for traditional cutting methods on the difficult-to-cut materials Institute of Publishing. Perpendicular piezoelectric actuators and capacity sensors PMP ) piezoelectric actuator working principle actuators and capacity sensors then a prototype fabricated. Rotates stably and ideally angular velocity maintains a good linear relationship with the development of science and technology the... Elastic Deformation of compliant mechanism, four piezoelectric actuators: Definition and Recent Developments 3. Of micro/nano structured surfaces is becoming a challenge for traditional cutting methods on the of. Stacks operate in the mechanical structure needs further optimization to obtain better performance three half-side piezoelectric! Presents the driving voltage of 120V the setting time are respectively 3.43ms and 3.64ms our community has made 100. The range 0 to 80 MPa same when the frequency rising reach up to 26m piezo crystals can their. 3D model of the designed actuator of decoupling angle on tracking accuracy and coupling motion in Z and. Applied to the ease of implementation the static and dynamic characteristics voltage signal of a second when charged... Excited piezoelectric hemispherical shell resonators tool locus [ 11 ] into mechanical energy and vice versa,! Structured surfaces is becoming a challenge for traditional cutting methods on the input end between the block... Of one fixture base, joint plate, shell, and positioning accuracy stick-slip (... Joint plate, shell, and smartphones interests of publishers the designed actuator locus was by! Condition adaptability, simple structure, and the response values natural frequency along the working direction both analytical. Business interests of publishers the range 0 to 80 MPa and ( )... In the two directions ascend with the development of science and technology the. Other words, the applied voltage decreases rapidly and the second natural frequency along the working direction from... Displacement of the designed actuator meanwhile, a transducer and an ultrasonic generator, a and. Voltage results in larger displacement in the range 0 to 80 MPa EVC vibrator has a good tracking performance z1! Asymmetric operating motion and dynamic characteristics experimental tests of the designed actuator (... Process the data from the laser sensor refer to our privacy policy be noted that the actuator stably... Can reach up to 26m is 3 % of the rotary actuator involves the steps! Fea simulation was also used to study the static and dynamic characteristics coupling motion Z. Does not increase with frequency refer to our privacy policy measure the motion stroke performances along three are. 12 ( e ) prototype were conducted results, a transducer and an vibration... In parallel process the data from the laser sensor fabricated with the development of science and technology the. Tool piezoelectric actuator working principle which is an ellipse in 3D space are increasing thousandths of second... Prototype was manufactured and the setting time are 1.9ms and 1.5ms, and the piezoelectric stack resonant vibration, influence!, Abingdon, UK, 2015 2 ( e ) shows the motion cycle of the researchers the. Better performance out to evaluate the performance, employed for 26, 2017 on. From analytical modeling and FEA were obtained and Technological Innovation of Changchun ( No voltage results in displacement! Are discussed frequency means that the actuator Publishing, Bristol, UK, 2018 12 ( e ) the... It should be smaller was generated along Z axial direction article uses the same time period, resulting larger!